| 摘要 |
PROBLEM TO BE SOLVED: To detect defects in quartz tubes built in a heat-treating oven as they are. SOLUTION: Various conditions such as a gas flow rate, a bubbling depth and the like are properly determined, already-known intervals at which bubbling occurs in a non-defective quartz tube and unknown intervals at which bubbling occurs in a quartz tube as an object of inspection are measured, and the measured values are compared with each other, it is determined by comparing these values whether defects reside in the quartz tube as an object of inspection or not, and furthermore the size of the defect can be estimated.
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