| 摘要 |
PROBLEM TO BE SOLVED: To start discharge with-lower voltage. SOLUTION: A front panel 10 having a display electrode and a dielectric layer formed in pair on a glass substrate is set on a substrate holder 32 in a vacuum chamber 31, the vacuum chamber is evacuated, a panel 10 is heated by a heater 35, and a film material (MgO) in a crucible 38, irradiated with a thermionic current 36 via a filament 37, is evaporated to form a MgO film. After the MgO film is formed, oxygen ions are implanted into the film surface with an oxygen ion gun 34 to cause the loss of oxygen in the MgO film.
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