ACTIVE VIBRATION ISOLATION DEVICE, ALIGNER, SEMICONDUCTOR DEVICE-MANUFACTURING METHOD, SEMICONDUCTOR- MANUFACTURING FACTORY, AND MAINTENANCE METHOD OF ALIGNER

摘要

PROBLEM TO BE SOLVED: To sufficiently isolate vibration even in a high-frequency threshold. SOLUTION: This active vibration isolation device is equipped with an actuator that has an air spring for giving force to an object whose vibration is to be isolated, a pressure detection means that detects the pressure of the actuator, and a control means that controls the actuator based on the detection value of the pressure detection means. In this case, by pressure detection means 22 and 92, the pressure of an air spring 11 or the inside of a tank 21 that is connected to the air spring 11 is detected directly.