| 摘要 |
PROBLEM TO BE SOLVED: To provide an exhaust gas recirculation device capable of highly accurately controlling opening and closing of a valve and also capable of improving response to opening and closing of the valve, response when closing it in particular. SOLUTION: A driving mechanism 8 to open and close an exhaust gas recirculation passage by moving a valve 7 is composed of an outer piston 17 movably provided in a housing, an inner piston 18 movably provided in the outer piston, a pressure chamber 23 formed between the both pistons, a first driving part 12 having a motor 11 to move the outer piston as power, and a second driving part 14 having pressure fluid to move the inner piston linked to a valve relative to the outer piston by supplying and exhausting the pressure fluid to the pressure chamber as power.
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