| 摘要 |
PROBLEM TO BE SOLVED: To provide a pattern treatment method that can improve edge roughness without generating any pattern deformation or the like. SOLUTION: In this pattern treatment method of a resist pattern 2 that is formed via exposure and development processes or a material pattern consisting of a resin pattern that is formed with the resist pattern as a mold, the surface region of the material pattern is selectively heated by casting light for allowing the surface region to selectively reflow. |
