| 摘要 |
PROBLEM TO BE SOLVED: To store and carry highly cleanly and safely a semiconductor wafer. SOLUTION: In a storage case of a wafer, there are provided two kinds of holding means having respectively contact portions one kind of which contacts only the inclined portion of the front surface side of the edge of the wafer and the other kind of which contacts only the inclined portion of the rear surface side of the edge of the wafer. The one kind of holding means is integrated with a case main body and an opposite inner wall surface of the case main body to the wafer front surface side. The other kind of holding means is integrated with the case main body and an opposite inner wall surface of the case main body to the wafer rear surface side. Further, each kind of holding means is bent extendedly from the center of the case main body to its end portion. Also, a gasket is provided in the portion wherein an upper cover of the front surface of the case main body and a lower cover of its rear surface are joined to each other.
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