发明名称 OPTICAL SCANNER AND TOMOGRAPHIC IMAGE ACQUIRING APPARATUS USING THE SAME
摘要 PROBLEM TO BE SOLVED: To realize a low-priced optical scanner allowing a drive system and a support system to be integrated with each other and to provide a tomographic image acquiring apparatus using the same. SOLUTION: In this optical scanner, a light source image having a repetitive pattern is projected onto a sample, and a scan image is obtained by moving the source image. This scanner is provided with a scanning plate disposed on an intermediate image plane of an objective lens to form the repetitive pattern by being rotated.
申请公布号 JP2001330555(A) 申请公布日期 2001.11.30
申请号 JP20000147989 申请日期 2000.05.19
申请人 YOKOGAWA ELECTRIC CORP 发明人 TANAAMI TAKEO
分类号 G01N21/64;G01N21/01;G01N21/17;(IPC1-7):G01N21/01 主分类号 G01N21/64
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