| 摘要 |
PROBLEM TO BE SOLVED: To simultaneously achieve a low dark current, a low noise, and a wide band in an avalanche photo diode that plays an important role in optical communication technique. SOLUTION: A distortion compensation superlattice multiplication layer 103 is used as a superlattice multiplication layer, thus thinning the film thickness of the superlattice multiplication layer without decreasing a multiplication rate and increasing the dark current, quickening a response speed, and, in addition, reducing an operating voltage.
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