| 摘要 |
PROBLEM TO BE SOLVED: To make small loss, small size, and high reliability compatible for an MIM capacitor while manufacturing process is simplified. SOLUTION: An effective width W in the direction vertical to signal propagation direction (a) or (b) and an effective length L in the direction parallel to the signal propagation of an MIM capacitor 5 are so set as to correspond to a desired value of a resistive component, resulting in reduced loss. A sufficient reliability is provided even with a thinner dielectrics film by reducing the thickness of a lower-part capacitance electrode 2a. With a thinner dielectrics film, a sufficient capacitance is provided even if an area is reduce for small size.
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