发明名称 LIGHT IMAGE MEASURING DEVICE USING TWO-DIMENSIONAL HETERODYNE DETECTING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a light image measuring device which can effectively detect in parallel light signals by using a two-dimensional heterodyne detecting method. SOLUTION: This light image measuring device comprises an interference optical system, a frequency shifter, light cutoff devices 7, 9, light sensors 8, 10 and a signal processing part. In the interference optical system, a light beam, which is emitted from a light source 1, is divided into two parts, i.e., a signal light and a reference light. An interference light is generated by superposing each other the signal light and the reference light. The frequency shifter shifts frequency of the reference light relative to frequency of the signal light. The light cutoff devices 7, 9 generate two series of interference light pulses, whose phase difference is 90 degrees, by synchronously cutting off the interference lights divided into two parts. The light sensors 8, 10 respectively receive the two series of interference light pulses. In the signal processing part, a plurality of light receiving signals, which are detected by the light sensors, are integrated. A subject 5 to be detected is arranged on an arrangement position. Signals of a surface layer or an internal layer of the subject 5 to be detected, which correspond to points of concern on a propagation path of the signal light, are generated.
申请公布号 JP2001330558(A) 申请公布日期 2001.11.30
申请号 JP20000153919 申请日期 2000.05.25
申请人 JAPAN SCIENCE & TECHNOLOGY CORP 发明人 CHAN KINPUI;TANNO NAOHIRO;AKIBA MASAHIRO
分类号 G01B11/24;G01B11/245;G01N21/17;G01N21/27;(IPC1-7):G01N21/17 主分类号 G01B11/24
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