METHOD AND DEVICE FOR MEASURING TEMPERATURE, AND SEMICONDUCTOR MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To accurately measure temperature of a measured object. SOLUTION: Laser beams are generated from a laser beam source 4 intermittently, and applied to the measured object w with a plurality of shifted wavelengths. Intensity of the incident beams, reflected beams from the measured object w, and radiated beams is measured for each of the shifted wavelengths, and a temperature of the measured object w is calculated based on the measurement result.