| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm type pump capable of affording high evacuating performance as a vacuum pump and inhibiting a large size of whole pump in spite of controlling at high accuracy and to provide a vacuum deaerating device capable of continuously deaerating on line while a stable deaerating amount is maintained. SOLUTION: In the diaphragm type pump, an output shaft 3 of a D.C. brushless motor B is projected from one side or both right and left sides of a motor casing 4 and a driving rod 2 for operating a diaphragm 1 is interlocked with the output shafts 3a, 3b. The diaphragm type pump A is used as a vacuum pump in a vacuum deaerating device for deaerating a dissolved gas from a liquid L1 to be deaerated through a permeation film by reducing by a vacuum pump the internal pressure of a vacuum container 20, in which the permeation film 32 for only passing a gas and inhibiting a permeation of liquid is installed.
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