CAPACITANCE MEASURING METHOD AND DEVICE THEREFOR

摘要

PROBLEM TO BE SOLVED: To shorten the time required to measure the capacitance of rows of electrodes concerning a capacitance measuring method and device therefor. SOLUTION: The capacitance measuring device is constituted of a multi- prober 20 to be collectively in contact with a plurality of rows of electrodes, a scanner 30 to switch the output of the multi-prober 20, and a plurality of capacitance measuring instruments 40 to parallelly measure the capacitance between the electrodes outputted from the scanner 30.