| 摘要 |
PROBLEM TO BE SOLVED: To provide a micromanipulator which is simple in its mounting without making the micromanipulator intricate in devices. SOLUTION: A Z-axis coarse focus adjustment control section 13 is provided with a Z-axis coarse focus adjustment cylinder 24 increased and decreased in the volume by a Z-axis coarse focus adjustment control means 22. A Z-axis fine focus adjustment control section 33 is provided with a Z-axis fine focus adjustment cylinder 41 increased and decreased in the volume by a Z-axis fine focus adjustment control means 40. A Z-axis drive section 53 is provided with a cylinder member 53E for moving a holder 56 when the volume is increased or decreased. The Z-axis coarse focus adjustment cylinder and the Z-axis fine focus adjustment cylinder are communicated with each other across a Z-axis first tube 8Z1. The Z-axis coarse focus adjustment cylinder and the cylinder member 53E are communicated with each other across a Z-axis second tube 8Z2. Working fluid is filled therein.
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