| 摘要 |
PROBLEM TO BE SOLVED: To facilitate the examination of a deviation in area between patterns of a specimen having cyclic patterns. SOLUTION: A specimen having cyclic patterns is photographed to input a pattern image (step 1), an area is measured for each of the patterns of the pattern image (step 2), the areas obtained are each converted to a luminance value to generate an area image with the values arranged (step 3), an intensified image is generated by a processing of intensifying the area image (step 4), the image undergoes a binary coding to generate a judging image (step 5) and then, examination is carried out based on the judging image.
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