| 发明名称 |
HEATER ENCAPSULATED WITH CARBON WIRE EXOTHERMIC BODY |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a heater encapsulated with carbon wire exothermic body, which is especially superior over aging with time. SOLUTION: Carbon fibers having a crystal structure in which a surface separation d (002) is 0.343 nm or less, and the size of crystal unit Lc (002) is 4.0 nm or more are knitted in string or braid state to form the carbon wire exothermic body, and this is encapsulated into a gualtz glass member. |
| 申请公布号 |
JP2001332373(A) |
申请公布日期 |
2001.11.30 |
| 申请号 |
JP20000154101 |
申请日期 |
2000.05.25 |
| 申请人 |
TOSHIBA CERAMICS CO LTD;TOKYO ELECTRON LTD |
发明人 |
SEKO JUN;KIN TOMIO;NAGATA TOMOHIRO;SAITO NORIHIKO;YOKOYAMA HIDEYUKI;KOBAYASHI MASAKAZU;SAITO TAKANORI;NAKAO MASARU |
| 分类号 |
H05B3/84;D04B21/20;D04C1/02;D04C1/06;H01L21/00;H01L21/324;H05B3/02;H05B3/14;H05B3/44;(IPC1-7):H05B3/14 |
主分类号 |
H05B3/84 |
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