发明名称 MAGNETIC THIN FILM AND METHOD OF MANUFACTURING THE MAGNETIC THIN FILM
摘要 PROBLEM TO BE SOLVED: To provide a magnetic thin film, having a vertical magnetization component in its central part by forming a fine-dot ferromagnetic film, using microstructure forming technology. SOLUTION: The fine-dot ferromagnetic film, formed on a substrate, has an average diameter of 0.1-10μm and thickness of 0.005-10μm, where the ratio of the thickness to the average diameter is two or smaller. The ferromagnetic film is a magnetic thin-film, having a vertical magnetization component in upward direction or in the downward direction with respect to the magnetic thin film in its central part. The magnetic thin-film is manufactured by forming a resist film on the substrate, then a part of the resist film is removed by dissolving, then a ferromagnetic film is formed respectively on the resist film, and the part of the substrate from which the resist film is removed, and then only the resist film and the magnetic layer formed on the resist film is removed to leave a ferromagnetic film formed on the substrate, forming a fine-dot ferromagnetic film on the substrate.
申请公布号 JP2001332421(A) 申请公布日期 2001.11.30
申请号 JP20010074415 申请日期 2001.03.15
申请人 TODA KOGYO CORP 发明人 SHINJO TERUYA
分类号 H01F10/08;H01F41/14;H01F41/34;(IPC1-7):H01F10/08 主分类号 H01F10/08
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