发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device wherein a leakage current in an interface between a surface silicon layer and a buried oxide film is not generated by potential difference between the surface silicon layer and a retaining substrate in an LDD transistor formed on a SOI substrate, and to provide a manufacturing method of the device. SOLUTION: In this semiconductor device and its manufacturing method, a leakage blocking layer 13 which has the same conductivity as the surface silicon layer 3 and high impurity concentration is formed below a source region 7.
申请公布号 JP2001332631(A) 申请公布日期 2001.11.30
申请号 JP20000154051 申请日期 2000.05.25
申请人 CITIZEN WATCH CO LTD 发明人 MASUDA TAKAOMI
分类号 H01L21/762;H01L21/8238;H01L27/08;H01L27/092;H01L29/786;(IPC1-7):H01L21/823 主分类号 H01L21/762
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