| 摘要 |
PROBLEM TO BE SOLVED: To provide a high frequency contact point sheet to conduct a performance test of IC elements of ultrahigh frequency with high accuracy. SOLUTION: The high frequency contact point sheet 8 is equipped with an insulation sheet 8a, a through hole 8b penetrating from a surface of one side through to the surface of the other side of the sheet 8a, plural silicon electrodes 8d which supports a central part 10 formed of a silicon plate and equipped with an electrode protruding part 8e on a surface of one side against an outer circumferential part 9 by at least one beam part 11, and which covers an opening of the through hole 8b, and in which the electrode protruding part 8e is equipped so as to be positioned in the opposite side of this through hole 8b, and an electro-conductive part 8c equipped at the side face of the through hole 8b in order to make an electric contact between the silicon electrodes 8d equipped in the state that they pinch the through hole 8.
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