发明名称 METHOD FOR MANUFACTURING FINE STRUCTURAL BODY
摘要 PROBLEM TO BE SOLVED: To provide an optical switching device having high durability and reliability as the optical switching device driving an optical element by an actuator. SOLUTION: In the case of manufacturing the layer of the optical element on the layer of the actuator 6 manufactured by photolithography technique by molding resin 35 by the use of a molding die 70, the temperature of the resin 35 is controlled by a heater 105, and the resin 35 is partially irradiated with light from a light source 125 and temporarily fixed. Thus, the die 70 and the actuator 6 are accurately aligned with a molded work 20, and film thickness is controlled. Therefore, the fine structural body having constitution that the actuator 6 and the optical element are laminated is accurately manufactured and yield is improved.
申请公布号 JP2001330786(A) 申请公布日期 2001.11.30
申请号 JP20000151654 申请日期 2000.05.23
申请人 SEIKO EPSON CORP 发明人 UEJIMA SHUNJI
分类号 G02B26/08;B81C1/00;G09F9/00;H04N5/74;H04N9/31;(IPC1-7):G02B26/08 主分类号 G02B26/08
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