| 摘要 |
PROBLEM TO BE SOLVED: To increase effective emitter area while fineness in design rules is being maintained. SOLUTION: On an emitter region 10, a first insulating film 4 having a first opening, and a second insulating film 6 having a second opening being smaller than the first one on the first opening are provided, and an emitter electrode material 9 where impurities are doped is buried in the first and second opening parts.
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