| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam test device which can generate a pulse beam of shorter pulse width Pw using the structure of an existing lens- barrel section as it is. SOLUTION: The charged particle beam test device comprises an X deflection means, a Y deflection means, and an aperture wherein the X deflection means deflects a charged particle beam in the X direction at a highest slew rate applicable to the charged particle beam test device. The Y deflection means deflects the charged particle beam in the Y direction orthogonal to the X direction at a highest slew rate applicable to the charged particle beam test device. A pulse beam is generated such that the slew rate periods of the X deflection means and the Y deflection means overlap and the charged particle beam is deflected at a rate higher by a factor of√2 to generate a pulse beam having such a pulse width as the time required for passing through the aperture is substantially shortened by a factor of 1/√2.
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