RETICLE FOR USE IN PHOTOLITHOGRAPHY AND METHODS FOR MAKING SAME AND INSPECTING

摘要

A method for inspecting a reticle to evaluate the degree of corner rounding of a feature of a test pattern includes placing a reticle having a photomask formed thereon under a microscope. The photomask (106) has a pattern corresponding to features of a semiconductor chip design defined therein. In addition, the photomask further has a test pattern (120) and a crosshair orientation mark (102) defined therein. The test pattern (120) has at least one test corner (110) for evaluating a degree of corner rounding when the test pattern is defined in the photomask (106). The crosshair orientation mark (102) is defined in the photomask to orient a crosshair of the microscope relative to the test pattern (120). Once the crosshair of the microscope is aligned with the crosshair orientation mark (102), the crosshair of the microscope is used to evaluate the degree of rounding of the test corner (110) of the test pattern (120). A method for inspecting a reticle to determine the pass/fail status of the reticle, a method for making a reticle, and a reticle for use in photolithography also are described.