Method of manufacturing film structure, method of manufacturing optical waveguide substrate and method of manufacturing second harmonic generation device

摘要

A film made of a single crystal of potassium lithium niobate is formed on a substrate made of a single crystal of potassium lithium niobate-potassium lithium tantalate solid solution. In this film formation, a temperature of the substrate is maintained in a range of 700° C.-850° C. and the film is formed by a metalorganic chemical vapor deposition method. By utilizing the film structure mentioned above, it is possible to generate a second harmonic wave in the optical waveguide with high efficiency.