High precision correction of continuously-measured workpiece co-ordinates, takes accelerations and dynamic flexural behavior of sensor into account

摘要

Dynamic flexural behavior of the e.g. sensing stylus is determined as a single or multi-dimensional parameter field, especially as a dynamic tensor (D). Correction values are calculated from the tensor, taking into account the stylus acceleration vector. Calculated values are used to correct the results of measurement. An Independent claim is included for corresponding instrumentation.