发明名称 PHASE SHIFT MASK
摘要 The present invention relates to coating compositions comprising busoxinone which are capable of forming a coating film having excellent antifouling performance and being capable of providing such excellent performance for a long period of time. The invention further relates to a method for protecting surfaces or objects in frequent or constant contact with water.
申请公布号 KR20010105870(A) 申请公布日期 2001.11.29
申请号 KR20000026916 申请日期 2000.05.19
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE, SANG HWA;SON, CHANG JIN
分类号 H01L21/027 主分类号 H01L21/027
代理机构 代理人
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