发明名称 ELECTROSTATIC CHUCK SYSTEM OF APPARATUS FOR MANUFACTURING SEMICONDUCTOR
摘要 Compounds of formula (I), wherein Y is O or S, Ar is an aryl group or a heteroaryl group, R is H, an alkyl group, a cycloalkyl group, a heterocycloalkyl group, an aryl group, a heteroaryl group, or -C(O)R 1, wherein R 1 is hydrogen, an alkyl group, a cycloalkyl group, a heterocycloalkyl group, an aryl group, a heteroaryl group, or NR 2 R 3 wherein R 2 and R 3 independently are hydrogen, an alkyl group, a cycloalkyl group, a heterocycloalkyl group, an aryl group, or a heteroaryl group, and X is - NH-OH or -OH. Pharmaceutically acceptable prodrugs, salts and solvates of these compounds. Methods of inhibiting the activity of metalloproteinases by administering a compound of the formula (I) or a prodrug, salt of solvate thereof. Pharmaceutical compositions comprising an effective amount of these compounds, prodrugs, salts, and solvates.
申请公布号 KR20010105940(A) 申请公布日期 2001.11.29
申请号 KR20000027070 申请日期 2000.05.19
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM, HAN IL
分类号 H01L21/68 主分类号 H01L21/68
代理机构 代理人
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