发明名称 CASCADED PLANAR EXPOSURE CHAMBER
摘要 <p>A device for heating relatively wide planar materials is formed by at least two parallel waveguides (250, 260). Each waveguide has an opening (30) that forms a single opening for a planar material. The planar material is propelled in a direction parallel to the propagation of an electromagnetic wave. If each waveguide is kept in TE mode, heating is uniform across the planar material. Power splitters (170), septums (62), tuning stubs (150), and impedance matching can be used to control the heating in each waveguide.</p>
申请公布号 WO2001091237(A1) 申请公布日期 2001.11.29
申请号 US2001016249 申请日期 2001.05.21
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