Forming acoustic resonator on substrate, involves forming earth electrode on suspension region, piezoelectric material on earth electrode, and upper electrode on piezoelectric material

摘要

The method involves forming an earth electrode (44) on a suspension region (48) of the substrate (46) so the electrode edges extend beyond the suspension region boundaries, forming a piezoelectric material (54) on the earth electrode and forming an upper electrode (58) on the piezoelectric material while keeping the edges in contact with all suspension region sides and releasing the inner earth electrode region from contact with the substrate. Independent claims are also included for the following: an acoustic resonator and a filter with a number of acoustic resonators.