An end effector for semiconductor wafers,申请号IES20010603-传众专利搜索

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发明名称	An end effector for semiconductor wafers
摘要
申请公布号	IES20010603(A2)	申请公布日期	2001.11.28
申请号	IES20010603	申请日期	2001.06.27
申请人	XSIL TECHNOLOGY LIMITED	发明人	JOHN TULLY;MICHAEL FLYNN
分类号	H01L21/00;H01L21/68;(IPC1-7):H01L21/00	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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