发明名称 Heater sealed with carbon wire heating element
摘要 <p>The heater sealed with a carbon wire heating element of the present invention has a carbon wire heating element sealed within a quartz glass member, said carbon wire being prepared by knitting carbon single fibers into a knitted cord or a braid, each wire having a crystal structure with a interlayer spacing d (002) thereof being 0.343 or less and a crystallite size Lc (002) thereof being 4.0nm or more. <IMAGE></p>
申请公布号 EP1158569(A2) 申请公布日期 2001.11.28
申请号 EP20010112064 申请日期 2001.05.25
申请人 TOSHIBA CERAMICS CO., LTD.;TOKYO ELECTRON LIMITED 发明人 SEKO, SUNAO;KONN, TOMIO;NAGATA, TOMOHIRO;SAITO, NORIHIKO;YOKOYAMA, HIDEYUKI;KOBAYASHI, MASAKAZU;SAITO, TAKANORI;NAKAO, KEN
分类号 H05B3/84;D04B21/20;D04C1/02;D04C1/06;H01L21/00;H01L21/324;H05B3/02;H05B3/14;H05B3/44;(IPC1-7):H01L21/00 主分类号 H05B3/84
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