<p>The heater sealed with a carbon wire heating element of the present invention has a carbon wire heating element sealed within a quartz glass member, said carbon wire being prepared by knitting carbon single fibers into a knitted cord or a braid, each wire having a crystal structure with a interlayer spacing d (002) thereof being 0.343 or less and a crystallite size Lc (002) thereof being 4.0nm or more. <IMAGE></p>
申请公布号
EP1158569(A2)
申请公布日期
2001.11.28
申请号
EP20010112064
申请日期
2001.05.25
申请人
TOSHIBA CERAMICS CO., LTD.;TOKYO ELECTRON LIMITED
发明人
SEKO, SUNAO;KONN, TOMIO;NAGATA, TOMOHIRO;SAITO, NORIHIKO;YOKOYAMA, HIDEYUKI;KOBAYASHI, MASAKAZU;SAITO, TAKANORI;NAKAO, KEN