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发明名称
Coating source with no central redeposition and high utilisation target
摘要
申请公布号
GB0124099(D0)
申请公布日期
2001.11.28
申请号
GB20010024099
申请日期
2001.10.08
申请人
GENCOA LIMITED
发明人
分类号
主分类号
代理机构
代理人
主权项
地址
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