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发明名称
Einrichtung zur Objektbeobachtung in Geraeten zur Materialbearbeitung mittels Ladungstraegerstrahl
摘要
申请公布号
DE1119428(B)
申请公布日期
1961.12.14
申请号
DE1958Z006834
申请日期
1958.08.30
申请人
FA. CARL ZEISS
发明人
OPITZ DR. WOLFGANG
分类号
B23K15/00;H01J37/09;H01J37/16;H01J37/30;H01J37/301;H01J37/304
主分类号
B23K15/00
代理机构
代理人
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