| 摘要 |
<p>The invention relates to a particle beam system having a source for generating a particle beam, means for focussing the particle beam onto a specimen, means for correcting the chromatic aberration, means for detecting a signal generated by the particle beam, means for processing the data of the detecting means to generate an image of the specimen, the processing means being adapted to combine at least a first image of the specimen that is chromatically corrected in a first direction and a second image of the specimen that is corrected in a second direction to generate a chromatically corrected image in both directions. The means for correcting the chromatic aberration are adapted to correct the chromatic aberration in one direction and there are means for rotating the specimen from a first orientation in which the first image is taken to a second orientation in which the second image is taken. <IMAGE></p> |
