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发明名称
DEVICE AND METHOD FOR THERMALLY TREATING SUBSTRATES
摘要
申请公布号
EP1157408(A1)
申请公布日期
2001.11.28
申请号
EP20000905002
申请日期
2000.02.02
申请人
STEAG HAMATECH AG
发明人
DRESS, PETER;DIETZE, UWE;SZEKERESCH, JAKOB;WEIHING, ROBERT
分类号
H01L21/00;(IPC1-7):H01L21/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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