发明名称 Semiconductor device with trenched substrate and method
摘要 A transistor structure has a recess formed in the upper surface of its base layer, an epitaxial (epi) layer grown on the upper surface in a manner to create a surface depression in the outer surface of the epi layer, the surface depression being generally aligned with the recess. A semiconductor element, such as a well or a gate, is formed on the epi layer aligned with the recess.
申请公布号 US6323090(B1) 申请公布日期 2001.11.27
申请号 US19990332638 申请日期 1999.06.09
申请人 IXYS CORPORATION 发明人 ZOMMER NATHAN
分类号 H01L29/08;H01L29/739;H01L29/78;(IPC1-7):H01L21/336 主分类号 H01L29/08
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