METHOD FORM FORMING LAMINATED FILM AND LAMINATED FILM

摘要

PROBLEM TO BE SOLVED: To form a laminated film of low resistance excellent in electrical conductivity and useful as a transparent electrically conductive thin film and a heat ray reflection film arranged in front of PDP by alternately laminating metallic oxide thin films and metallic thin films on a substrate into a multilayer by a sputtering method. SOLUTION: As to the method for forming a laminated film in which metallic oxide thin films and metallic thin films are deposited on a substrate in a laminated manner by a sputtering method, the concentration of oxygen in an atmospheric gas at the time of depositing the metallic oxide thin films is controlled to 5 to 15 vol%.