SHAPE MEMORY ALLOY ACTUATOR, AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To increase magnetostrictive susceptibility and to attain time saving and cost reduction at thin film deposition. SOLUTION: This shape memory alloy actuator utilizing a shape memory effect has a substrate 21 and a thin film 22 composed of Fe-Pd alloy which is formed on the substrate 21 and has an acicular metallic structure oriented in the directions of (111) face and (220) face. Moreover, respective atomic percentages of Fe and Pd satisfy the relation of Fe:Pd=(60 to 50):(40 to 50).