发明名称 Lift and rotate assembly for use in a workpiece processing station and a method of attaching the same
摘要 A lift and rotate assembly for use in a workpiece processing station. The lift and rotate assembly includes a body having a slim profile and pins located on opposite sides for mounting the assembly onto a tool frame. The lift and rotating assembly further includes a rotating mechanism coupling a processing head to the body, and for rotating the process head with respect to the body. The rotating mechanism includes a motor, wherein the motor is located within the processing head and the shaft of the motor is coupled to and rotationally fixed with respect to the body. The lift and rotate assembly further includes a lift mechanism for lifting the process head with respect to the body. A cable assembly within the lift and rotate assembly includes a common cable loop for feeding additional length of cable along both the lift direction and the rotational direction of movement.
申请公布号 US6322677(B1) 申请公布日期 2001.11.27
申请号 US20000604041 申请日期 2000.06.27
申请人 SEMITOOL, INC. 发明人 WOODRUFF DANIEL J.;BLECK MARTIN C.
分类号 C25D17/04;C25D7/12;C25D17/06;H01L21/00;H01L21/304;H01L21/677;(IPC1-7):C25D17/04 主分类号 C25D17/04
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