| 摘要 |
An angular velocity sensor device includes drive oscillators oscillated by driving in drive direction a0, and detecting oscillators connected to the drive oscillators and oscillated in detecting directions a1, a2 by a Coriolis force, which is generated by an angular velocity in a direction K. The directions a1, a2 respectively make an angle theta with the direction K. Detection electrodes are provided for the detecting oscillators, and produce output signals. A signal caused by an inertia force and a signal caused by the Coriolis force are obtained from the output signals, and the angular velocity is determined by the two signals.
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