Anti-vibration apparatus, exposure apparatus using the same, device manufacturing method, and anti-vibration method

摘要

An anti-vibration apparatus for actively damping vibrations of an object by generating control forces for reducing the vibrations includes a first actuator for generating a first control force, and a second actuator which generates a second control force and is driven on a driving principle different from that for the first actuator. The first actuator generates forces in the vertical and horizontal directions. The second actuator generates a force in at least one of the vertical and horizontal directions.