| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma cleaning device which can be compactly formed. SOLUTION: The plasma cleaning device comprises a base 12, a guide which is provided on the base 12 for conducting an object 6, a lid 13, with an open lower part, which is supported in such a way that the lid 13 freely comes into contact with the base 12 from above and separates from the latter and besides forms a closed space 12 when the lid 13 is brought into contact with the base 12, a first electrode 32 grounded at the lid 13 and a second electrode 34, to which high-frequency voltage is applied at the base 12. In addition, cooling means 36 and 53 are provided which cool the second electrode 34 with an outwardly open lower part from below by means of an air cooling system.
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