Xerographic photoreceptor primarily formed by the hydrogenated amorphous silicon material and the method for manufacturing the same

摘要

A xerographic photoreceptor primarily formed by amorphous silicon material is disclosed, wherein the xerographic photoreccptor is a photosensitive drum used in copying and manufactured by the plasma enhanced low pressure chemical vapor deposition system. Such a drum has a higher resolution, and a longer lifetime. In this structure, an Al2O3 oxidization layer is grown on an aluminum substrate. Then a n type hydrogenated amorphous silicon blocking layer is grown on the aluminum substrate with Al2O3 oxidization layer. Then an intrinsic hydrogenated amorphous silicon charge generating transmission layer is grown on the n type hydrogenated amorphous silicon blocking layer. Finally a hydrogenated amorphous carbon surface protecting layer is grown on the intrinsic hydrogenated amorphous silicon charge generation transport layer for forming a xerographic photoreceptor with a multiple layer structure. Not only the manufacturing process is simple, but also a lager area is achieved in preparing a film manufacture and thus, the cost will be reduced.