发明名称 METHOD FOR PRODUCING ETCHED ARTICLE AND DEVICE THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a device for producing an etched article in which the uneveness of stripes is hard to occur. SOLUTION: Both sides of a continuously running metallic sheet 1 are coated with photosensitive resin by a photosensitive resin coating device, a shadow mask pattern is baked and exposed to both sides of the metallic sheet 1 coated with the photosensitive resin. The baked and exposed photosensitive resin is developed and is dried by a developing device, and the lower face of the developed metallic sheet 1 is subjected to etching by an etching device. While a coating roller is rotated in the direction opposite to the running direction of the metallic sheet 1, an etching resisting protective film is reciprocated in the vertical direction to the running direction, and the face already subjected to the etching in the etched metallic sheet is coated with the etching resisting protective film.
申请公布号 JP2001329385(A) 申请公布日期 2001.11.27
申请号 JP20000149074 申请日期 2000.05.19
申请人 TOSHIBA CORP 发明人 SAGO SEIJI
分类号 G03F7/40;C23F1/00;H01J9/14;(IPC1-7):C23F1/00 主分类号 G03F7/40
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