发明名称 Film frame substrate fixture
摘要 The present invention provides a fixture for mounting a substrate to mounting tape on a film frame so as to retain the substrate to the film frame for dicing. A plurality of grooves for receiving a cutting saw extend longitudinally and transversely across the fixture to define die regions. The fixture also includes a plurality of apertures that align with the substrate and with dies to be cut from the substrate. The aligned apertures supply vacuum to the substrate to retain the substrate and cut dies in the fixture. When the dicing is completed, the vacuum is turned off and the individual dies can be readily removed from the fixture.
申请公布号 US6321739(B1) 申请公布日期 2001.11.27
申请号 US19990293151 申请日期 1999.04.16
申请人 MICRON TECHNOLOGY, INC. 发明人 ROBERTS JAY W.
分类号 H01L21/301;H01L23/544;(IPC1-7):B28D7/04 主分类号 H01L21/301
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