| 摘要 |
An electrically tunable Fabry-Perot structure using a deformable multi-layer mirror construction wherein Ga1-aAlaAs, where a <0.1, is used as the sacrificial layer which may be selectively removed using a citric acid enchant. The multi-layer mirrors consist of N and M period of quarter wavelength layers where N and M are integers, or integers plus 1/2. Further, the mirrors are made from alternating layers of Ga1-xAlxAs, where X>0.96, and a material selected from the group consisting of either Ga1-zAlzAs, where 0.7>Z>0, or Ga1-yAlyAs/Ga1-zAlzAs/Ga1-yAlyAs, where 0.7>Z>0 and y>0.5. The Ga1-xAlxAs is wet oxidized by exposing its edge to water in a nitrogen or helium atmosphere at a temperature of between about 360° C. and 450° C. so as to transform it to AlOx. The resulting AlOx layers abut the sacrificial layer and act as etch stops during the formation of a cantilever Fabry-Perot structure by etching of the sacrificial layer.
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