CLEANING DEVICE AND CLEANING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a cleaning method which can suppress an installation cost and floor area as far as possible. SOLUTION: Tanks for storing a cleaning liquid crystal L are disposed in a plurality 4, 5 and 6 according to the number of necessary cleaning process steps. A cleaning basket is single and in any of the cleaning process steps, the cleaning of the object 2 to be cleaned is carried out within the same cleaning basket 3. The lower equipment cost and the smaller floor area are therefor necessitated.