发明名称 |
Circulating system for shaft-type linear motors |
摘要 |
A circulating system (10) for cooling a shaft-type linear motor (12) is provided herein. The motor (12) includes a magnet array (22) and a coil assembly (16). The circulating system (10) includes coil housing (36) that encircles the coil assembly (16) and defines a fluid passageway (46) between the coil housing (36) and the coil assembly (16). Fluid (44) from a fluid source (42) is forced through an inlet (38) into the fluid passageway (46). The flow rate of the fluid (44) is controlled to maintain an outer surface (111) of the coil housing (36) at a set temperature to control the effect of the motor (12) on the surrounding environment and the surrounding components.
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申请公布号 |
US6323567(B1) |
申请公布日期 |
2001.11.27 |
申请号 |
US19990471296 |
申请日期 |
1999.12.24 |
申请人 |
NIKON CORPORATION |
发明人 |
HAZELTON ANDREW J.;ONO KAZUYA |
分类号 |
G03F7/20;F04B23/02;H01L21/027;H02K9/19;H02K41/02;H02K41/03;(IPC1-7):H02K41/00 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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