发明名称 Circulating system for shaft-type linear motors
摘要 A circulating system (10) for cooling a shaft-type linear motor (12) is provided herein. The motor (12) includes a magnet array (22) and a coil assembly (16). The circulating system (10) includes coil housing (36) that encircles the coil assembly (16) and defines a fluid passageway (46) between the coil housing (36) and the coil assembly (16). Fluid (44) from a fluid source (42) is forced through an inlet (38) into the fluid passageway (46). The flow rate of the fluid (44) is controlled to maintain an outer surface (111) of the coil housing (36) at a set temperature to control the effect of the motor (12) on the surrounding environment and the surrounding components.
申请公布号 US6323567(B1) 申请公布日期 2001.11.27
申请号 US19990471296 申请日期 1999.12.24
申请人 NIKON CORPORATION 发明人 HAZELTON ANDREW J.;ONO KAZUYA
分类号 G03F7/20;F04B23/02;H01L21/027;H02K9/19;H02K41/02;H02K41/03;(IPC1-7):H02K41/00 主分类号 G03F7/20
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