发明名称 Integrated circuit probe pad metal level
摘要 An integrated circuit is described which includes a metal level primarily comprising probe pads for testing the integrated circuit. This additional metal level is isolated from the integrated circuit upper metal level by an insulating layer. This probe metal level is selectively connected to the metal level and other regions of the integrated circuit to form electrical connections. The probe metal level allows for accurate and extensive pre-production testing of the integrated circuit without sacrificing valuable real-estate of the metal level. The probe metal level and the insulating layer are described as useful during pre-production phases and are preferably eliminated during production of the integrated circuit.
申请公布号 US6323048(B1) 申请公布日期 2001.11.27
申请号 US20000652618 申请日期 2000.08.31
申请人 MICRON TECHNOLOGY INC. 发明人 CHEVALLIER CHRISTOPHE J.
分类号 H01L23/58;(IPC1-7):H01L21/66 主分类号 H01L23/58
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