NEW POLYCYCLIC UNSATURATED HYDROCARBON DERIVATIVE AND METHOD FOR PRODUCING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a new polycyclic unsaturated hydrocarbon derivative useful as a monomer for producing radiation-sensitive resists which have good dry etching resistance and excellent transparency for radiations having wavelengths of <=160 nm. SOLUTION: This polycyclic unsaturated hydrocarbon derivative represented by the general formula [X is an acid-dissociating dissolution-inhibiting group; Y is an electron-attracting group; (m) is 0 or 1].